GAFNIY O‘STIRILGAN KREMNIY NA’MUNALARINI YUQORI TEMPERATURADA ELEKTROFIZIK XUSUSIYATINING O‘ZGARISHI
DOI:
https://doi.org/10.1808/xh4r4275Keywords:
Monokristal kremniy, gafniy, solishtirma qarshilik, kislorod oksid, dieliktrik qatlam, to‘rt zont.Abstract
Elektronika qurulmalari uchun yarimo‘tkazgichli materiallarni ishlab chiqish va takomillashtirish zamonaviy fan va texnikaning asosiy yo'nalishlari bo'lib qolmoqda. Kremniy kristall panjarasiga boshqa elementlarning atomlarini kiritish uning xususiyatlarini sezilarli darajada o‘zgartirish va yuqori samarali elektron qurilmalarni yaratish uchun yangi imkoniyatlar ochish imkonini beradi. Bugungi kunda qiyin eruvchi elementlardan (QEE) foydalanish orqali radiatsiyaga chidamli materialni olish orqali turli xil yarimo‘tkazgichli qurulmalar tayorlash dolzard bo‘lib bormoqda. Bu ishda qiyin eruvchi materiallardan gafniyni tanlab oldik. Gafniy elementi Mendeliyev davriy jadvalida IV guruh elementi bo‘lib metal oylasiga mansub hisoblanadi. Gafniy elwmentini kremniyga legirlash bir muncha mushkul ishlardan biri hisoblanadi chunki gafniy atomlarini o‘chami kremniynikiga nisbatan ancha katta shu bilan yuqori temperaturada kislorod, uglerod, bor, kremniy elementlari bilan tez reaksiyaga kirishuvchan hisoblanadi. Bundan xulosa qilish mumkunkiy yuqoridagi elementlar bilan har xil turdagi bog‘larni hosil qiladi. Bu jarayonlarni tahlil qilishda eng asosiy usullardan biri to‘rt zont keng qo‘llaniladi. Bunda qalinlik bo‘yicha tahlil qilish ko‘p samarali fizik parametrlarni aniqlashga imkon beradi
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